Gwang Hoon Park, Yoh-Han Pao, Kurt G. Eyink, Steven R. LeClair, M. S. Soclof. Neural-Net Based Optical Ellipsometry for Monitoring Growth of Semiconductor Films. In Alfons Crespo, editor, Postprint Volume from the IFAC Symposium on Artificial Intelligence in Real-Time Control, AIRTC 1994, Valencia, Spain, October 3-5, 1994. pages 123-128, Elsevier, 1994. [doi]
Abstract is missing.