Sangtak Park, Manu Pallapa, John T. W. Yeow, Eihab M. Abdel-Rahman. Low voltage electrostatic actuation and angular displacement measurement of micromirror coupled with resonant drive circuit. In 38th Annual Conference on IEEE Industrial Electronics Society, IECON 2012, Montreal, QC, Canada, October 25-28, 2012. pages 3976-3981, IEEE, 2012. [doi]
Abstract is missing.