Data based segmentation and summarization for sensor data in semiconductor manufacturing

Eunjeong L. Park, Jooseoung Park, Jiwon Yang, Sungzoon Cho, Young-Hak Lee, Hae-Sang Park. Data based segmentation and summarization for sensor data in semiconductor manufacturing. Expert Syst. Appl., 41(6):2619-2629, 2014. [doi]

Abstract

Abstract is missing.