Sparse Bayesian long short-term memory networks for computationally efficient stochastic modeling of plasma etch processes - researchr publication

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Damdae Park, Sangwon Ryu, Gon-Ho Kim, Jong Min Lee 0002. Sparse Bayesian long short-term memory networks for computationally efficient stochastic modeling of plasma etch processes. Computers & Chemical Engineering, 159:107696, 2022. [doi]

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