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Reliability improvement in microstructures by reducing the impact velocity through electrostatic force modulation

Giorgio De Pasquale, M. Barbato, V. Giliberto, Gaudenzio Meneghesso, Aurelio Somà. Reliability improvement in microstructures by reducing the impact velocity through electrostatic force modulation. Microelectronics Reliability, 52(9-10):1808-1811, 2012. [doi]

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