Inductively-Coupled MEMS Pressure Sensor

Sneh Patel, Sima Darbasi, Marco A. Antoniades, Virgilio Valente. Inductively-Coupled MEMS Pressure Sensor. In IEEE Biomedical Circuits and Systems Conference, BioCAS 2023, Toronto, ON, Canada, October 19-21, 2023. pages 1-5, IEEE, 2023. [doi]

Abstract

Abstract is missing.