Demystifying Defects: Federated Learning and Explainable AI for Semiconductor Fault Detection

Tanish Patel, Ramalingam Murugan, Gokul Yenduri, Rutvij H. Jhaveri, Hichem Snoussi, Tarek Gaber. Demystifying Defects: Federated Learning and Explainable AI for Semiconductor Fault Detection. IEEE Access, 12:116987-117007, 2024. [doi]

Authors

Tanish Patel

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Ramalingam Murugan

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Gokul Yenduri

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Rutvij H. Jhaveri

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Hichem Snoussi

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Tarek Gaber

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