Stick-slip Actuation of Electrostatic Stepper Micropositioners for Data Storage - the µWalker

Mihai Patrascu, Stefano Stramigioli. Stick-slip Actuation of Electrostatic Stepper Micropositioners for Data Storage - the µWalker. In 2005 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2005), 24-27 July 2005, Banff, Alberta, Canada. pages 81-86, IEEE Computer Society, 2005. [doi]

Abstract

Abstract is missing.