Erik Paul, Holger Herzog, Sören Jansen, Christian Hobert, Eckhard Langer. SEM-based nanoprobing on 32 and 28 nm CMOS devices challenges for semiconductor failure analysis. Microelectronics Reliability, 54(9-10):2115-2117, 2014. [doi]
@article{PaulHJHL14,
title = {SEM-based nanoprobing on 32 and 28 nm CMOS devices challenges for semiconductor failure analysis},
author = {Erik Paul and Holger Herzog and Sören Jansen and Christian Hobert and Eckhard Langer},
year = {2014},
doi = {10.1016/j.microrel.2014.07.133},
url = {http://dx.doi.org/10.1016/j.microrel.2014.07.133},
researchr = {https://researchr.org/publication/PaulHJHL14},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {54},
number = {9-10},
pages = {2115-2117},
}