SEM-based nanoprobing on 32 and 28 nm CMOS devices challenges for semiconductor failure analysis - researchr publication

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Erik Paul, Holger Herzog, Sören Jansen, Christian Hobert, Eckhard Langer. SEM-based nanoprobing on 32 and 28 nm CMOS devices challenges for semiconductor failure analysis. Microelectronics Reliability, 54(9-10):2115-2117, 2014. [doi]

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