Oven-Controlled MEMS Oscillator with Integrated Micro-Evaporation Trimming

Binbin Pei, Ke Sun, Heng Yang, Chaozhan Ye, Peng Zhong, Tingting Yu, Xinxin Li. Oven-Controlled MEMS Oscillator with Integrated Micro-Evaporation Trimming. Sensors, 20(8):2373, 2020. [doi]

Abstract

Abstract is missing.