Electrostatic Deflections of Volume Constrained MEMS

John A. Pelesko, G. Goldsztein. Electrostatic Deflections of Volume Constrained MEMS. In 2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada. pages 76, IEEE Computer Society, 2003. [doi]

Abstract

Abstract is missing.