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Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications

Néstor N. Peña-García, Luz Antonio Aguilera-Cortés, Max A. González-Palacios, Jean-Pierre Raskin, Agustín Leobardo Herrera-May. Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications. Sensors, 18(10):3545, 2018. [doi]

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