Full-chip wire-oriented back-end-of-line TDDB hotspot detection and lifetime analysis

Shaoyi Peng, Ertugrul Demircan, Mehul D. Shroff, Sheldon X.-D. Tan. Full-chip wire-oriented back-end-of-line TDDB hotspot detection and lifetime analysis. Integration, 70:90-98, 2020. [doi]

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