A Low-G Silicon Inertial Micro-Switch with Enhanced Contact Effect Using Squeeze-Film Damping

Yingchun Peng, Zhi-yu Wen, Dong-ling Li, Zheng-guo Shang. A Low-G Silicon Inertial Micro-Switch with Enhanced Contact Effect Using Squeeze-Film Damping. Sensors, 17(2):387, 2017. [doi]

Authors

Yingchun Peng

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Zhi-yu Wen

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Dong-ling Li

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Zheng-guo Shang

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