A Low-G Silicon Inertial Micro-Switch with Enhanced Contact Effect Using Squeeze-Film Damping

Yingchun Peng, Zhi-yu Wen, Dong-ling Li, Zheng-guo Shang. A Low-G Silicon Inertial Micro-Switch with Enhanced Contact Effect Using Squeeze-Film Damping. Sensors, 17(2):387, 2017. [doi]

Abstract

Abstract is missing.