Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators

Rafel Perelló-Roig, Jaume Verd, Sebastiàn A. Bota, Jaume Segura. Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators. Sensors, 18(9):3124, 2018. [doi]

Abstract

Abstract is missing.