Adaptive control of a MEMS steering mirror for suppression of laser beam jitter

Néstor Osvaldo Pérez-Arancibia, Neil Y. Chen, Steve Gibson 0001, Tsu-Chin Tsao. Adaptive control of a MEMS steering mirror for suppression of laser beam jitter. In American Control Conference, ACC 2005, Portland, OR, USA, 8-10 June, 2005. pages 3586-3591, IEEE, 2005. [doi]

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