Design and control of optimal feedforward trajectories for scanners: STM example

Hector Perez, Q. Zou, Santosh Devasia. Design and control of optimal feedforward trajectories for scanners: STM example. In American Control Conference, ACC 2002, Anchorage, Alaska, USA, May 8-10 2002. pages 2305-2312, IEEE, 2002. [doi]

Abstract

Abstract is missing.