Experimental In-Situ Observatory on Brownian Motion Behavior of 105 nm Sized Silica Particles During Chemical Mechanical Polishing of 4H-SiC by an Evanescent Field - researchr publication authors

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Thitipat Permpatdechakul, Panart Khajornrungruang, Keisuke Suzuki, Aran Blattler, Jiraphan Inthiam. Experimental In-Situ Observatory on Brownian Motion Behavior of 105 nm Sized Silica Particles During Chemical Mechanical Polishing of 4H-SiC by an Evanescent Field. IJAT, 18(1):47-57, January 2024. [doi]

This author has not been identified. Look up 'Thitipat Permpatdechakul' in GoogleThis author has not been identified. Look up 'Panart Khajornrungruang' in GoogleThis author has not been identified. Look up 'Keisuke Suzuki' in GoogleThis author has not been identified. Look up 'Aran Blattler' in GoogleThis author has not been identified. Look up 'Jiraphan Inthiam' in Google

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