Thitipat Permpatdechakul, Panart Khajornrungruang, Keisuke Suzuki, Aran Blattler, Jiraphan Inthiam. Experimental In-Situ Observatory on Brownian Motion Behavior of 105 nm Sized Silica Particles During Chemical Mechanical Polishing of 4H-SiC by an Evanescent Field. IJAT, 18(1):47-57, January 2024. [doi]
@article{PermpatdechakulKSBI24,
title = {Experimental In-Situ Observatory on Brownian Motion Behavior of 105 nm Sized Silica Particles During Chemical Mechanical Polishing of 4H-SiC by an Evanescent Field},
author = {Thitipat Permpatdechakul and Panart Khajornrungruang and Keisuke Suzuki and Aran Blattler and Jiraphan Inthiam},
year = {2024},
month = {January},
doi = {10.20965/ijat.2024.p0047},
url = {https://doi.org/10.20965/ijat.2024.p0047},
researchr = {https://researchr.org/publication/PermpatdechakulKSBI24},
cites = {0},
citedby = {0},
journal = {IJAT},
volume = {18},
number = {1},
pages = {47-57},
}