5 Thin Films for Capacitive RF MEMS Switches

Anna Persano, Fabio Quaranta, Adriano Cola, Antonietta M. Taurino, Giorgio De Angelis, Romolo Marcelli, Pietro Siciliano. 5 Thin Films for Capacitive RF MEMS Switches. J. Sensors, 2010, 2010. [doi]

@article{PersanoQCTAMS10,
  title = {5 Thin Films for Capacitive RF MEMS Switches},
  author = {Anna Persano and Fabio Quaranta and Adriano Cola and Antonietta M. Taurino and Giorgio De Angelis and Romolo Marcelli and Pietro Siciliano},
  year = {2010},
  doi = {10.1155/2010/487061},
  url = {http://dx.doi.org/10.1155/2010/487061},
  researchr = {https://researchr.org/publication/PersanoQCTAMS10},
  cites = {0},
  citedby = {0},
  journal = {J. Sensors},
  volume = {2010},
}