5 Thin Films for Capacitive RF MEMS Switches

Anna Persano, Fabio Quaranta, Adriano Cola, Antonietta M. Taurino, Giorgio De Angelis, Romolo Marcelli, Pietro Siciliano. 5 Thin Films for Capacitive RF MEMS Switches. J. Sensors, 2010, 2010. [doi]

Abstract

Abstract is missing.