High-order electromechanical ΣΔ modulation in micromachined inertial sensors

Vladimir P. Petkov, Bernhard E. Boser. High-order electromechanical ΣΔ modulation in micromachined inertial sensors. IEEE Trans. on Circuits and Systems, 53(5):1016-1022, 2006. [doi]

Abstract

Abstract is missing.