Semiconductor Wafer Surface: Automatic Defect Classification with Deep CNN

Charissa Phua, Lau Bee Theng. Semiconductor Wafer Surface: Automatic Defect Classification with Deep CNN. In 2020 IEEE Region 10 Conference, TENCON 2020, Osaka, Japan, November 16-19, 2020. pages 714-719, IEEE, 2020. [doi]

Authors

Charissa Phua

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Lau Bee Theng

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