Fedor G. Pikus, Andres J. Torres. Advanced multi-patterning and hybrid lithography techniques. In 21st Asia and South Pacific Design Automation Conference, ASP-DAC 2016, Macao, Macao, January 25-28, 2016. pages 611-616, IEEE, 2016. [doi]
@inproceedings{PikusT16,
title = {Advanced multi-patterning and hybrid lithography techniques},
author = {Fedor G. Pikus and Andres J. Torres},
year = {2016},
doi = {10.1109/ASPDAC.2016.7428079},
url = {http://dx.doi.org/10.1109/ASPDAC.2016.7428079},
researchr = {https://researchr.org/publication/PikusT16},
cites = {0},
citedby = {0},
pages = {611-616},
booktitle = {21st Asia and South Pacific Design Automation Conference, ASP-DAC 2016, Macao, Macao, January 25-28, 2016},
publisher = {IEEE},
isbn = {978-1-4673-9569-4},
}