Modeling of zero TCF and maximum bandwidth orientation for Lithium Tantalate RF MEMS resonators

Gayathri Pillai, Wei-Siang Tan, Cheng-Chi Chen, Sheng-Shian Li. Modeling of zero TCF and maximum bandwidth orientation for Lithium Tantalate RF MEMS resonators. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 450-454, IEEE, 2016. [doi]

Abstract

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