Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities

Vânia C. Pinto, Paulo J. Sousa, Vanessa F. Cardoso, Graça Minas. Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities. Micromachines, 5(3):738-755, 2014. [doi]

Abstract

Abstract is missing.