Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection

Maira Possas-Abreu, Farbod Ghassemi, Lionel Rousseau, Emmanuel Scorsone, Emilie Descours, Gaëlle Lissorgues. Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection. Sensors, 17(6):1163, 2017. [doi]

@article{Possas-AbreuGRS17,
  title = {Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection},
  author = {Maira Possas-Abreu and Farbod Ghassemi and Lionel Rousseau and Emmanuel Scorsone and Emilie Descours and Gaëlle Lissorgues},
  year = {2017},
  doi = {10.3390/s17061163},
  url = {https://doi.org/10.3390/s17061163},
  researchr = {https://researchr.org/publication/Possas-AbreuGRS17},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {17},
  number = {6},
  pages = {1163},
}