Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection

Maira Possas-Abreu, Farbod Ghassemi, Lionel Rousseau, Emmanuel Scorsone, Emilie Descours, Gaƫlle Lissorgues. Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection. Sensors, 17(6):1163, 2017. [doi]

Abstract

Abstract is missing.