C. Pramanik, T. Islam, H. Saha, J. Bhattacharya, S. Banerjee, Sagnik Dey. Design, Fabrication, Testing and Simulation of Porous Silicon Based Smart MEMS Pressure Sensor. In 18th International Conference on VLSI Design (VLSI Design 2005), with the 4th International Conference on Embedded Systems Design, 3-7 January 2005, Kolkata, India. pages 235-240, IEEE Computer Society, 2005. [doi]
Abstract is missing.