Oleksandr Prokhorov, Yurii Pronchakov, Oleg Fedorovich, Nataliia Kunanets. Modeling of Technological Process in Nanoelectronic Production. In IEEE 15th International Conference on Computer Sciences and Information Technologies, CSIT 2020, Zbarazh, Ukraine, September 23-26, 2020 - Volume 1. pages 324-327, IEEE, 2020. [doi]
Abstract is missing.