Comparisons between Membrane, Bridge and Cantilever Miniaturized Resistive Vacuum Gauges

Kasun Gardiye Punchihewa, Evan Zaker, Rade Kuljic, Koushik Banerjee, Tatjana Dankovic, Alan Feinerman, Heinz Busta. Comparisons between Membrane, Bridge and Cantilever Miniaturized Resistive Vacuum Gauges. Sensors, 12(7):8770-8781, 2012. [doi]

Abstract

Abstract is missing.