Frequency output MEMS resonator on membrane pressure sensors

Vahid Qaradaghi, Mohammad Mahdavi, Varun Kumar, Siavash Pourkamali. Frequency output MEMS resonator on membrane pressure sensors. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

@inproceedings{QaradaghiMKP16,
  title = {Frequency output MEMS resonator on membrane pressure sensors},
  author = {Vahid Qaradaghi and Mohammad Mahdavi and Varun Kumar and Siavash Pourkamali},
  year = {2016},
  doi = {10.1109/ICSENS.2016.7808883},
  url = {https://doi.org/10.1109/ICSENS.2016.7808883},
  researchr = {https://researchr.org/publication/QaradaghiMKP16},
  cites = {0},
  citedby = {0},
  pages = {1-3},
  booktitle = {2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016},
  publisher = {IEEE},
  isbn = {978-1-4799-8287-5},
}