Frequency output MEMS resonator on membrane pressure sensors

Vahid Qaradaghi, Mohammad Mahdavi, Varun Kumar, Siavash Pourkamali. Frequency output MEMS resonator on membrane pressure sensors. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

Abstract

Abstract is missing.