Package-Tolerant MEMS Thermal Wind Sensors Using SIG Technology

Bo Qi, Wenxuan Chen, Zhenxiang Yi, Ming Qin, Qing-An Huang, Lili Gao. Package-Tolerant MEMS Thermal Wind Sensors Using SIG Technology. IEEE T. Instrumentation and Measurement, 74:1-9, 2025. [doi]

@article{QiCYQHG25,
  title = {Package-Tolerant MEMS Thermal Wind Sensors Using SIG Technology},
  author = {Bo Qi and Wenxuan Chen and Zhenxiang Yi and Ming Qin and Qing-An Huang and Lili Gao},
  year = {2025},
  doi = {10.1109/TIM.2025.3541663},
  url = {https://doi.org/10.1109/TIM.2025.3541663},
  researchr = {https://researchr.org/publication/QiCYQHG25},
  cites = {0},
  citedby = {0},
  journal = {IEEE T. Instrumentation and Measurement},
  volume = {74},
  pages = {1-9},
}