MEMS Based Triaxial Electrochemical Seismometer

Wenjie Qi, Chao Xu, Bowen Liu, Xichen Zheng, Tian Liang, Xu She, Jian Chen, Junbo Wang, Deyong Chen. MEMS Based Triaxial Electrochemical Seismometer. In 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020, San Diego, CA, USA, September 27-30, 2020. pages 59-62, IEEE, 2020. [doi]

Abstract

Abstract is missing.