A novel failure response policy for single-arm cluster tools with residency time constraints

Yan Qiao, Naiqi Wu, Chunrong Pan, MengChu Zhou. A novel failure response policy for single-arm cluster tools with residency time constraints. In 2014 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2014, San Diego, CA, USA, October 5-8, 2014. pages 120-126, IEEE, 2014. [doi]

Authors

Yan Qiao

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Naiqi Wu

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Chunrong Pan

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MengChu Zhou

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