A novel failure response policy for single-arm cluster tools with residency time constraints

Yan Qiao, Naiqi Wu, Chunrong Pan, MengChu Zhou. A novel failure response policy for single-arm cluster tools with residency time constraints. In 2014 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2014, San Diego, CA, USA, October 5-8, 2014. pages 120-126, IEEE, 2014. [doi]

@inproceedings{QiaoWPZ14-0,
  title = {A novel failure response policy for single-arm cluster tools with residency time constraints},
  author = {Yan Qiao and Naiqi Wu and Chunrong Pan and MengChu Zhou},
  year = {2014},
  doi = {10.1109/SMC.2014.6973894},
  url = {http://dx.doi.org/10.1109/SMC.2014.6973894},
  researchr = {https://researchr.org/publication/QiaoWPZ14-0},
  cites = {0},
  citedby = {0},
  pages = {120-126},
  booktitle = {2014 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2014, San Diego, CA, USA, October 5-8, 2014},
  publisher = {IEEE},
  isbn = {978-1-4799-3840-7},
}