Yan Qiao, Naiqi Wu, FaJun Yang, MengChu Zhou, Qinghua Zhu. Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 48(4):622-636, 2018. [doi]
@article{QiaoWYZZ18,
title = {Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation},
author = {Yan Qiao and Naiqi Wu and FaJun Yang and MengChu Zhou and Qinghua Zhu},
year = {2018},
doi = {10.1109/TSMC.2016.2600583},
url = {https://doi.org/10.1109/TSMC.2016.2600583},
researchr = {https://researchr.org/publication/QiaoWYZZ18},
cites = {0},
citedby = {0},
journal = {IEEE Transactions on Systems, Man, and Cybernetics, Part A},
volume = {48},
number = {4},
pages = {622-636},
}