Robust Scheduling of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Disturbance

Yan Qiao, Naiqi Wu, FaJun Yang, MengChu Zhou, Qinghua Zhu, Ting Qu. Robust Scheduling of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Disturbance. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 49(6):1228-1240, 2019. [doi]

@article{QiaoWYZZQ19,
  title = {Robust Scheduling of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Disturbance},
  author = {Yan Qiao and Naiqi Wu and FaJun Yang and MengChu Zhou and Qinghua Zhu and Ting Qu},
  year = {2019},
  doi = {10.1109/TSMC.2017.2721979},
  url = {https://doi.org/10.1109/TSMC.2017.2721979},
  researchr = {https://researchr.org/publication/QiaoWYZZQ19},
  cites = {0},
  citedby = {0},
  journal = {IEEE Transactions on Systems, Man, and Cybernetics, Part A},
  volume = {49},
  number = {6},
  pages = {1228-1240},
}