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Real-time control policy for single-arm cluster tools with residency time constraints and activity time variation by using Petri net

Yan Qiao, Naiqi Wu, MengChu Zhou. Real-time control policy for single-arm cluster tools with residency time constraints and activity time variation by using Petri net. In Proceedings of 9th IEEE International Conference on Networking, Sensing and Control, ICNSC 2012, Beijing, China, April 11-14, 2012. pages 34-39, IEEE, 2012. [doi]

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