Scheduling of time constrained dual-arm cluster tools with wafer revisiting - researchr publication authors

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Yan Qiao, Naiqi Wu, MengChu Zhou. Scheduling of time constrained dual-arm cluster tools with wafer revisiting. In 2013 IEEE International Conference on Automation Science and Engineering, CASE 2013, Madison, WI, USA, August 17-20, 2013. pages 868-873, IEEE, 2013. [doi]

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