Yan Qiao, Naiqi Wu, MengChu Zhou. Scheduling of Dual-Arm Cluster Tools With Wafer Revisiting and Residency Time Constraints. IEEE Trans. Industrial Informatics, 10(1):286-300, 2014. [doi]
@article{QiaoWZ14,
title = {Scheduling of Dual-Arm Cluster Tools With Wafer Revisiting and Residency Time Constraints},
author = {Yan Qiao and Naiqi Wu and MengChu Zhou},
year = {2014},
doi = {10.1109/TII.2013.2272702},
url = {http://dx.doi.org/10.1109/TII.2013.2272702},
researchr = {https://researchr.org/publication/QiaoWZ14},
cites = {0},
citedby = {0},
journal = {IEEE Trans. Industrial Informatics},
volume = {10},
number = {1},
pages = {286-300},
}