Scheduling of Dual-Arm Cluster Tools With Wafer Revisiting and Residency Time Constraints

Yan Qiao, Naiqi Wu, MengChu Zhou. Scheduling of Dual-Arm Cluster Tools With Wafer Revisiting and Residency Time Constraints. IEEE Trans. Industrial Informatics, 10(1):286-300, 2014. [doi]

Abstract

Abstract is missing.