Yan Qiao, Naiqi Wu, MengChu Zhou, Qingyun Dai. Petri net-based scheduling analysis of dual-arm cluster tools subject to wafer revisiting and residency time constraints. In Proceedings of 10th IEEE International Conference on Networking, Sensing and Control, ICNSC 2013, Evry, France, April 10-12, 2013. pages 252-257, IEEE, 2013. [doi]
Abstract is missing.