Scheduling and Control of Startup Process for Single-Arm Cluster Tools With Residency Time Constraints

Yan Qiao, MengChu Zhou, Naiqi Wu, Qinghua Zhu. Scheduling and Control of Startup Process for Single-Arm Cluster Tools With Residency Time Constraints. IEEE Trans. Contr. Sys. Techn., 25(4):1243-1256, 2017. [doi]

Abstract

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