Wafer Defect Inspection Optimization With Partial Coverage - A Numerical Approach

Ming Qin, Zhongshun Shi, Weiwei Chen 0003, Siyang Gao, Leyuan Shi. Wafer Defect Inspection Optimization With Partial Coverage - A Numerical Approach. IEEE T. Automation Science and Engineering, 18(4):1916-1927, 2021. [doi]

Abstract

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