Feng Qin, Xiuyu Zhang, Yijia Du, Gang Dai, Leilei Bao, Jingfu Bao. High g-factor MEMS vibration platform for in-situ self-calibration of accelerometer. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 521-525, IEEE, 2017. [doi]
Abstract is missing.