Jin Qiu, Shawn Cunningham, Arthur Morris. Effect of sacrificial layer compliance on thermal stresses of composite MEMS beams. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 1073-1078, IEEE, 2009. [doi]
@inproceedings{QiuCM09-0, title = {Effect of sacrificial layer compliance on thermal stresses of composite MEMS beams}, author = {Jin Qiu and Shawn Cunningham and Arthur Morris}, year = {2009}, doi = {10.1109/NEMS.2009.5068759}, url = {http://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068759}, researchr = {https://researchr.org/publication/QiuCM09-0}, cites = {0}, citedby = {0}, pages = {1073-1078}, booktitle = {4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009}, publisher = {IEEE}, isbn = {978-1-4244-4629-2}, }